9^th ESA ROUND TABLE ON MICRO AND NANO TECHNOLOGIES FOR SPACE APPLICATIONS
Swiss Tech Convention Center | Lausanne, Switzerland | 10-13 June 2014

Session 9

Reliability, Testing and Characterisation II

High Reliability Silicon-Based MNT: Microelectronics, MEMS and Packaging

H. Kappert¹, H. Vogt¹, W. Brockherde¹, U. Paschen¹.

¹Fraunhofer IMS.

Reliability Aspects of Microsystem Resonators: X-ray Based Packaging Strain Analysis and Radiation Tolerance

T. Bandi¹, H.R. Shea², A. Neels¹.

¹CSEM, ²EPFL.

TiTaAIN Nanocomposite Thin Films for Mechanical Applications

P. Choquet, D. Duday¹, C. Séguineau², P. Djemia³, J.-B. Chemin¹, T. Girot¹, J.-M. Desmarres⁴, L. Belliard⁵.

¹CRP Gabriel Lippmann, ²NOVAMEMS, ³LSPM, UPR-CNRS 3407, Université Paris 13, ⁴CNES, ⁵UPMC

The Mechanism of irradiation effect on MEMS device

Liu Haitao¹, Liu Ziyu¹, Zhao Jiahao², Zhang Hao³, G. Yongfeng².

¹Qian Xuesen Laboratory of Space Technology, ²Tsinghua University, ³College of Precision Instrument and Opto-electronics Engineering

MEMS Qualification Procedure for Space Applications

A. T. Pereira¹, R. Fettig¹, A. Neels², X. Maeder², F. Souchon³, D. Vogel⁴, M. Lahti⁵.

¹Lusospace, ²CSEM, ³CEA, ⁴Fraunhofer, ⁵VTT.