9^th ESA ROUND TABLE ON MICRO AND NANO TECHNOLOGIES FOR SPACE APPLICATIONS
Swiss Tech Convention Center | Lausanne, Switzerland | 10-13 June 2014

Session 3

Reliability, Testing and Characterisation I

AFM Calibration Procedure and Studies of Mechanical Behaviour of MEMS/NEMS Micromembranes

M. Michalowski¹, G. Ekwinski², Z. Rymuza¹.

¹Warsaw University of Technology, ²Nanoidea.

Optical Fourier Transform Based Vibration Characterization for MEMS Actuator Structure

G. Yongfeng¹, Y. Zheng¹, Z. Jiahao¹.

¹Tsinghua University.

Improvement of the Reliability of Contactless Electrostatically Actuated MEMS through the Control of Dielectric Charging

M. Dominguez-Pumar,¹, S. Gorreta,¹, J. Pons-Nin¹, E. Blokhina², O. Feely².

¹TechnicalUniversity of Catalonia, ²University College Dublin.