9^th ESA ROUND TABLE ON MICRO AND NANO TECHNOLOGIES FOR SPACE APPLICATIONS
Swiss Tech Convention Center | Lausanne, Switzerland | 10-13 June 2014

Session 5

Sensors and Actuators

A Silicon Microseismometer for Planetary Deployment

T. Pike¹, S. Calcutt², I. Standley³, G. Dou¹, A. Delahunty¹, A. Mukherjee¹.

¹Imperial College London, ²Oxford University, ³Kinemetrics.

MOSFETs-Based Pressure Sensors in Thin Film SOI Technology

B. Olbrechts¹, B. Rue¹, M. al Kadi Jazairli¹, J.-P. Raskin¹, D. Flandre¹.

¹Université catholique de Louvain.

Development of MEMS Space Qualified Pressure Transducers

E. Zervakis ; A. Michalakou ; K. Spiropoulou ; I. Glykiotis ; G. Fikos ; A. Depastas ; T. Athanasopoulos

THEON SENSORS S.A.

CMOS-Integrated MEMS and Photonic Sensors for Application in Pico-Satellites

X. Rottenberg¹, V. Rochus¹, R. Jansen¹, A. Ray Chaudhuri¹, P. Helin¹, S. Severi¹, B. Dubois¹, G. Brondani Torri¹, T. Claes¹, P. Neutens¹, P. Van Dorpe¹, A. Lambrechts¹, P. Soussan¹, P. Deshpande¹, S. Donnay¹, P. De Moor¹, H. Tilmans¹.

¹imec.