5th MNT: Session 2

Session 2: MEMS Evaluation, Qualification and Reliability

Chair: John Hopkins (ESA) and Fran�ois Pressecq (CNES)

• MOEMS technologies : highlights and trends
  Bensoussan A.*; Forestier M.*; Brochier L.*; Muraro J.L.*
  * Alcatel Alenia Space
• Thermal Laser Stimulation for MEMS characterisation and failure analysis from principles to case studies
  Perdu P.*; Beaudoin F.**; Briand D.***; Lafontan X.****
  * CNES, ** THALES, *** Institute of Microtechnology, University of Neuch�teel; **** NOVAMEMS
• Failure mechanisms and reliability issues of RF-MEMS switches
  De Wolf I.*; Czarnecki P.*; Jourdain A.*; Kalicinski S.*; Modlinski R.*; Muller P.*; Rottenberg X.*; Soussan P.*; Tilmans H.*
  * IMEC
• Dielectric charging effects in RF MEMS capacitive switches
  Crunteanu A.*; Blondy P.**; Champeaux C.***; Catherinot A.***; Tristant P.***; Vendier O.****; Cazaux J. L.****; Marchand L.*****
  *Research Institute in Optical and Microwave Communications, University of Limoges,** Institute in Optical and Microwave Communications, University of Limoges, *** SPCTS, University of Limoges, **** Alcatel Space Industries, ***** ESA/ESTEC
• Development of a nanoindentation tool for tests at different temperatures and its use for the microcaracterisation of MEMS
  Seguineau C.* ; Desmarres J. M.* ; Dantas de Morais L.**; Schmitt P.*** Lellouchi D.***
  * CNES, ** EPSILON Ingenierie, *** NOVAMEMS