Document Properties | |
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Feedback to: | Laurent Marchand |
Published: | 09-01-2006 |
Public Document |
5th MNT: Session 2
Session 2: MEMS Evaluation, Qualification and Reliability
Chair: John Hopkins (ESA) and Fran�ois Pressecq (CNES)
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MOEMS technologies : highlights and trends
Bensoussan A.*; Forestier M.*; Brochier L.*; Muraro J.L.*
* Alcatel Alenia Space -
Thermal Laser Stimulation for MEMS characterisation and failure analysis from principles to case studies
Perdu P.*; Beaudoin F.**; Briand D.***; Lafontan X.****
* CNES, ** THALES, *** Institute of Microtechnology, University of Neuch�teel; **** NOVAMEMS -
Failure mechanisms and reliability issues of RF-MEMS switches
De Wolf I.*; Czarnecki P.*; Jourdain A.*; Kalicinski S.*; Modlinski R.*; Muller P.*; Rottenberg X.*; Soussan P.*; Tilmans H.*
* IMEC -
Dielectric charging effects in RF MEMS capacitive switches
Crunteanu A.*; Blondy P.**; Champeaux C.***; Catherinot A.***; Tristant P.***; Vendier O.****; Cazaux J. L.****; Marchand L.*****
*Research Institute in Optical and Microwave Communications, University of Limoges,** Institute in Optical and Microwave Communications, University of Limoges, *** SPCTS, University of Limoges, **** Alcatel Space Industries, ***** ESA/ESTEC -
Development of a nanoindentation tool for tests at different temperatures and its use for the
microcaracterisation of MEMS
Seguineau C.* ; Desmarres J. M.* ; Dantas de Morais L.**; Schmitt P.*** Lellouchi D.***
* CNES, ** EPSILON Ingenierie, *** NOVAMEMS