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Micro and Nano Technologies
Introduction
Micro and nano-technologies (MNT’s) allow the creation of functional devices with extremely small dimensions; up to less than one-hundredth of the width of a human hair for nano-technologies. Microtechnologies or MEMS (Micro Electro Mechanical Systems) are usually fabricated using standard silicon-chip processing, offering immense and diverse capabilities in very small packages.
The incorporation of MNT’s into spacecraft design has a number of benefits including possible reduction in mass, low power consumption, low volume, high reliability and low cost and it is anticipated that these technologies will form an integral part of space systems.
A major attraction of MST is its ability to produce devices of significantly improved performance such as accuracy, operating speed and complexity. This is true, particularly for micromechanical devices when associated with embedded analogue and/or digital circuitry. Partly because MST has been derived from the semiconductor industry, significant mass production cost reductions are possible.
Activities
Completed
Funding |
Title |
Objectives |
Contract number |
Abstract
summary report |
TRP
|
Methodology for complex Micro-Propulsion Systems Space validation
|
-
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4200020720/0/0/0
|
 |
TRP
|
Reliability of MEMS based pressure sensors
|
-
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4200018804/0/0/0
|
 |
TRP
|
Nanotechnology survey
|
-
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4200021669/0/0/0
|
 |
TRP
|
Nanotechnology survey
|
-
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4200021668/0/0/1
|
 |
TRP
|
RF potentialities of carbon nanotubes for nanoscale interconnections
|
-
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4200022486/0/0/1
|
 |
TRP
|
Avoidance of MEMS dielectric charge trapping
|
-
|
4200022081/0/0/0
|
 |
MAD ; Techn assessment
|
Study of MEMS failure mechanisms
|
-
|
4200015846/0/0/0
|
|
MAD ; Techn assessment
|
Testing efectiveness in the qualification process of MEMS
|
-
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4200016981/0/0/0
|
|
MAD ; Techn assessment
|
MEMS COTS
|
-
|
4200016718/0/0/0
|
|
TRP
|
Non hermetic MEMS
|
-
|
4200017161/0/0/0
|
 |
TRP
|
Micro-Optical Electromechanical Systems (Moems) delta space qualification methodology
|
-
|
4200018669/0/0/0
|
 |
Portug. TF
|
Procedures for MEMS qualification
|
-
|
4200021272/0/0/0
|
|
JWST ; TRP
|
Evaluation of a commercial digital micro-mirror device for multi-object spectrometers
|
-
|
4200021946/0/0/0
|
 |
ARTES5
|
ENDORFINS : Enabling deployment of RF MEMS technology in space communication
|
-
|
4200018613/9/0/0
|
 |
Greece. TF
|
Theon sensors-performance demonstration of theons existing pressure modules for space applications
|
-
|
4200022261/0/0/0
|
|
GSTP
|
Enabling of high Q micromachined planar filter components
|
-
|
4200019621/0/0/0
|
 |
TRP
|
Wales: Wafer level encapsulation for micro-systems
|
-
|
4200022465/0/0/1
|
 |
GSTP
|
Reliability assessment of a MEMS-based isolation valve for propulsion systems |
|
4000103767/0/0/1 |
 |
.
Ongoing
Funding |
Title |
Objectives |
Contract number |
Additional information |
TRP
|
Validation and experimental verification of ESA MEMS qualification methodology
|
The objective of this activity is to draft an ECSS Technical Memorandum (TM) addressing space MEMS qualification methodology
|
4000108095/0/0/0
|
 |
ECI
|
MEMS reliability assessment (EEE413)
|
The objective of this activity shall be to develop a standardization methodology and Technical Memorandum (TM) for the reliability assessment of MEMS products using commercial or ESA developed MEMS components
|
4000109903/0/0/0
|
 |
StrIn
|
Mems fabry-perot interferometer technology for miniaturized hyperspectral imagers and microspectrometers
|
The objective of this activity is to study the new imaging spectrometer concept and to perform the proof of concept by building and testing breadboards and to construct a space-compatible Proto Flight Model of the Imaging Spectrometer in accordance to the Aalto-1 Finnish student satellite requirements
|
4000106267/0/0/1
|
 |
ECI
|
RF MEMS switch technology for space application:
Phase 1: Benchmarking and selection
|
The first phase of this program, “benchmarking and selection”, aims to assess and compare available European RF-MEMS switch technologies. In order to do that, a selection of RFMEMS switch technologies will undergo an identical tests campaign (identical test planand test house). This benchmarking shall be the first phase toward the preparation of a subsequent industrialization phase and further space qualification of the preferred RFMEMS source.
|
4000111806 /0/0/1
4000112270/0/0/1
|


|
LuxSup
|
Luxembourg freestanding structure optimization by mechanical tensile test ( LUXFSS / EASIMECA )
|
The project aims at assessing the direct characterization of freestanding thin films by micro-tensile testing and thus at validating the technical developments that are under progress
|
4000106221/0/0/0
|
 |
ECI
|
RF-MEMS High-Q Reconfigurable Coaxial Filter in LTCC Package
|
Development of a reconfigurable microwave filter in C-band using RF-MEMS as tuning element
|
4000114585
|
|
TRP
|
Connectivity and Packaging of Systems-of-Microsystems
|
Demonstrate an integration and packaging solution enabling the realisation of miniaturised 3D System-in-Packages, including MEMS components and electronics components assembled in a stack.
|
4000107288
|
|
StrIn
|
Wafer Level Encapsulation for Micro-Systems – PLUS
|
Establish a pathway and procedure for the production and packaging of MEMS devices at wafer level by other sources than the wafer supplier for the European Space Industry based on the modelling of reliability and development of new processes.
|
4000107658
|
|
TRP/GSTP
|
Miniaturization of a Magnetometer based on Micro Technology
|
To prototype and test a fully monolithic magnetometer based on MEMS technology
|
4000108574
|
|
LuxSup
|
Nanosense
|
Development of nano-sensors for control and monitoring of contamination, co funding with CNES, The project consists in the proof of concept in a laboratory environment of a molecular contamination chemical Nano-sensor. The unique Nano-sensors to be designed, developed and tested here will be filtering molecules via stearic hindrance and will integrate nanoporous membranes with an array of pores size
|
4000108670 |
|
ECI
|
CAPS (Contactless Angular Position Sensor) : space evaluation
|
Space evaluation of the sensor packaged component (using ESCC 9000 as baseline)
|
4000113134
|
|
Additional information
Since 1995, ESA has organized several roundtables on Micro/Nano Technologies for Space applications. They aim at encouraging and triggering effective cooperation between industries and universities/research centers, and to facilitate technology transfer.
List round tables:
List of technical Experts