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Published: 11-11-2016
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Micro and Nano Technologies

Introduction

Micro and nano-technologies (MNT’s) allow the creation of functional devices with extremely small dimensions; up to less than one-hundredth of the width of a human hair for nano-technologies. Microtechnologies or MEMS (Micro Electro Mechanical Systems) are usually fabricated using standard silicon-chip processing, offering immense and diverse capabilities in very small packages.

The incorporation of MNT’s into spacecraft design has a number of benefits including possible reduction in mass, low power consumption, low volume, high reliability and low cost and it is anticipated that these technologies will form an integral part of space systems.

A major attraction of MST is its ability to produce devices of significantly improved performance such as accuracy, operating speed and complexity. This is true, particularly for micromechanical devices when associated with embedded analogue and/or digital circuitry. Partly because MST has been derived from the semiconductor industry, significant mass production cost reductions are possible.

Activities

Completed

 

Funding Title Objectives Contract number Abstract
summary report

TRP

Methodology for complex Micro-Propulsion Systems Space validation

-

4200020720/0/0/0

TRP

Reliability of MEMS based pressure sensors

-

4200018804/0/0/0

TRP

Nanotechnology survey

-

4200021669/0/0/0

TRP

Nanotechnology survey

-

4200021668/0/0/1

TRP

RF potentialities of carbon nanotubes for nanoscale interconnections

-

4200022486/0/0/1

TRP

Avoidance of MEMS dielectric charge trapping

-

4200022081/0/0/0

MAD ; Techn assessment

Study of MEMS failure mechanisms

-

4200015846/0/0/0

 

MAD ; Techn assessment

Testing efectiveness in the qualification process of MEMS

-

4200016981/0/0/0

 

MAD ; Techn assessment

MEMS COTS

-

4200016718/0/0/0

 

TRP

Non hermetic MEMS

-

4200017161/0/0/0

TRP

Micro-Optical Electromechanical Systems (Moems) delta space qualification methodology

-

4200018669/0/0/0

Portug. TF

Procedures for MEMS qualification

-

4200021272/0/0/0

 

JWST ; TRP

Evaluation of a commercial digital micro-mirror device for multi-object spectrometers

-

4200021946/0/0/0

ARTES5

ENDORFINS : Enabling deployment of RF MEMS technology in space communication

-

4200018613/9/0/0

Greece. TF

Theon sensors-performance demonstration of theons existing pressure modules for space applications

-

4200022261/0/0/0

 

GSTP

Enabling of high Q micromachined planar filter components

-

4200019621/0/0/0

TRP

Wales: Wafer level encapsulation for micro-systems

-

4200022465/0/0/1

GSTP

Reliability assessment of a MEMS-based isolation valve for propulsion systems   4000103767/0/0/1

 

 

 

 

.

Ongoing

Funding Title Objectives Contract number Additional information

TRP

Validation and experimental verification of ESA MEMS qualification methodology

The objective of this activity is to draft an ECSS Technical Memorandum (TM) addressing space MEMS qualification methodology

4000108095/0/0/0


ECI

MEMS reliability assessment (EEE413)

The objective of this activity shall be to develop a standardization methodology and Technical Memorandum (TM) for the reliability assessment of MEMS products using commercial or ESA developed MEMS components

4000109903/0/0/0

StrIn

Mems fabry-perot interferometer technology for miniaturized hyperspectral imagers and microspectrometers

The objective of this activity is to study the new imaging spectrometer concept and to perform the proof of concept by building and testing breadboards and to construct a space-compatible Proto Flight Model of the Imaging Spectrometer in accordance to the Aalto-1 Finnish student satellite requirements

4000106267/0/0/1


ECI

RF MEMS switch technology for space application:
Phase 1: Benchmarking and selection
The first phase of this program, “benchmarking and selection”, aims to assess and compare available European RF-MEMS switch technologies. In order to do that, a selection of RFMEMS switch technologies will undergo an identical tests campaign (identical test planand test house). This benchmarking shall be the first phase toward the preparation of a subsequent industrialization phase and further space qualification of the preferred RFMEMS source.

4000111806 /0/0/1

4000112270/0/0/1

LuxSup

Luxembourg freestanding structure optimization by mechanical tensile test ( LUXFSS / EASIMECA )
The project aims at assessing the direct characterization of freestanding thin films by micro-tensile testing and thus at validating the technical developments that are under progress

4000106221/0/0/0

ECI
RF-MEMS High-Q Reconfigurable Coaxial Filter in LTCC Package
Development of a reconfigurable microwave filter in C-band using RF-MEMS as tuning element
4000114585

 

TRP
Connectivity and Packaging of Systems-of-Microsystems
Demonstrate an integration and packaging solution enabling the realisation of miniaturised 3D System-in-Packages, including MEMS components and electronics components assembled in a stack.
4000107288

 

StrIn
Wafer Level Encapsulation for Micro-Systems – PLUS
Establish a pathway and procedure for the production and packaging of MEMS devices at wafer level by other sources than the wafer supplier for the European Space Industry based on the modelling of reliability and development of new processes.
4000107658

 

TRP/GSTP
Miniaturization of a Magnetometer based on Micro Technology
To prototype and test a fully monolithic magnetometer based on MEMS technology
4000108574

 

LuxSup
Nanosense
Development of nano-sensors for control and monitoring of contamination, co funding with CNES, The project consists in the proof of concept in a laboratory environment of a molecular contamination chemical Nano-sensor. The unique Nano-sensors to be designed, developed and tested here will be filtering molecules via stearic hindrance and will integrate nanoporous membranes with an array of pores size
4000108670

 

ECI
CAPS (Contactless Angular Position Sensor) : space evaluation
Space evaluation of the sensor packaged component (using ESCC 9000 as baseline)
4000113134
 

 

Additional information

Since 1995, ESA has organized several roundtables on Micro/Nano Technologies for Space applications. They aim at encouraging and triggering effective cooperation between industries and universities/research centers, and to facilitate technology transfer.

List round tables:

  • ESA MNT 4 Round table 4 on micro/nano technologies for space
  • ESA MNT 5 Round table 5 on micro/nano technologies for space
  • ESA MNT 6 Round table 6 on micro/nano technologies for space
  • ESA MNT 7 Round table 7 on MICRO/NANO technologies for space
  • ESA MNT 8 Round table 8 on MICRO/NANO technologies for space

 

 

List of technical Experts

 

Agencies Name Domain Email Phone

ESA

Laurent Marchand

Micro and Nano Technologies

Laurent.Marchand@esa.int

+31 (0)7 15 65 49 38

ESA

Nicolas Saillen

Micro and Nano Technologies

Nicolas.Saillen@esa.int

+31 (0)7 15 65 42 82

 

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