5th MNT: Session 3

Session 3: Micromachining and Fabrication

Chair: Peter de Maagt (ESA) and Coumar Oudea (EADS-ST)

• SOI-CMOS technology for Thin Film Sensors on Membranes
  Olbrechts B.* ; Castadot C.* ; Laconte J.* ; Flandre D.* ; Raskin J.-P.*
  * Université catholique de Louvain
• R&D of Powder Blasting Micro-Manufacturing of Space Components
  McBride G.*
  * Rutherford Appleton Laboratory
• 3-D self assembled SOI MEMS: fabrication and numerical simulation
  Mendez C.*; De Vincenzo P.*; Klapka I.* ; Rochus V.** ; Iker F.*** ; Andr� N.*** ; Raskin J.-P.***
  * Open Engineering, ** Univerist� de Li�ge, *** Universit� catholique de Louvain
• A Nordic approach to novel micro- and nanotechnology
  Tuovinen J.*; Ahopelto J.*; Aikio J.*; Karioja P.*; Kattelus H.*; Kololuoma T.*; Kopola H.*; Oja A.*; Vähä-Heikkilä T.*
  * VTT Information Technology
• Analysis and Design Techniques for Shape Memory Alloy Microactuators for Space Applications
  Langelaar M.*; Yoon G. H.**; Gurav S. P.*; Kim Y. Y.***; Van Keulen F.*
  * Delft University of Techology, ** Technical University of Denmark, *** Seoul National University
• Design and Development of a ?-Field Emission Electric Propulsion Thruster
  Tajmar M.*; Scharlemann C.*; Vasiljevich I.*; Marhold K.*
  * ARC
• Silicon MEMS Pressure Sensor for Space Applications
  Nese M.*; Seeberg B-E.*; Lang M.**
  * Presens AS, ** ESA/ESTEC