Document Properties | |
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Feedback to: | Laurent Marchand |
Published: | 08-01-2006 |
Public Document |
5th MNT: Session 3
Session 3: Micromachining and Fabrication
Chair: Peter de Maagt (ESA) and Coumar Oudea (EADS-ST)
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SOI-CMOS technology for Thin Film Sensors on Membranes
Olbrechts B.* ; Castadot C.* ; Laconte J.* ; Flandre D.* ; Raskin J.-P.*
* Université catholique de Louvain -
R&D of Powder Blasting Micro-Manufacturing of Space Components
McBride G.*
* Rutherford Appleton Laboratory -
3-D self assembled SOI MEMS: fabrication and numerical simulation
Mendez C.*; De Vincenzo P.*; Klapka I.* ; Rochus V.** ; Iker F.*** ; Andr� N.*** ; Raskin J.-P.***
* Open Engineering, ** Univerist� de Li�ge, *** Universit� catholique de Louvain -
A Nordic approach to novel micro- and nanotechnology
Tuovinen J.*; Ahopelto J.*; Aikio J.*; Karioja P.*; Kattelus H.*; Kololuoma T.*; Kopola H.*; Oja A.*; Vähä-Heikkilä T.*
* VTT Information Technology -
Analysis and Design Techniques for Shape Memory Alloy Microactuators for Space Applications
Langelaar M.*; Yoon G. H.**; Gurav S. P.*; Kim Y. Y.***; Van Keulen F.*
* Delft University of Techology, ** Technical University of Denmark, *** Seoul National University -
Design and Development of a ?-Field Emission Electric Propulsion Thruster
Tajmar M.*; Scharlemann C.*; Vasiljevich I.*; Marhold K.*
* ARC -
Silicon MEMS Pressure Sensor for Space Applications
Nese M.*; Seeberg B-E.*; Lang M.**
* Presens AS, ** ESA/ESTEC